Publications of IRIS Members

Reference (inproceedings)

F. Beyeler, S. Muntwyler, B. J. Nelson, "Design, Fabrication and Calibration of a Silicon Micro Force-Torque Sensor", Proc. of 10th anniversary international conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2008), Zurich, Switzerland, May 2008.

Full paper

euspen_3dof_v03.pdf (258 KB)

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