IRIS :: Publications

Publications of IRIS Members

Reference (article)

F. Beyeler, S. Muntwyler, B. J. Nelson, "A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution", IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 18, No. 2, April 2009, pp. 433-441.

BibTeX entry

@ARTICLE{Beyeler_09_02,
	Author = {Felix Beyeler and Simon Muntwyler and Bradley J. Nelson},
	Title = {A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution},
	Journal = {IEEE/ASME Journal of Microelectromechanical Systems (JMEMS)},
	Volume = {18},
	Number = {2},
	Month = {April},
	Year = {2009},
	Pages = {pp. 433-441},
	Abstract = {This paper describes the design of a six-axis microelectromechanical systems (MEMS) force–torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x-, y-, and z-axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed.},
	Keywords = {Calibration, force measurement, microelectromechanical devices, microsensors, torque measurement}
}

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