IRIS :: Publications

Publications of IRIS Members

Reference (article)

D. J. Bell, Y. Sun, L. Zhang, L. X. Dong, B. J. Nelson, D. Grützmacher, "Three-dimensional nanosprings for electromechanical sensors", Sensors and Actuators A, Vol. 130, No. pp. 54-61, 2006.

BibTeX entry

@ARTICLE{Bell_05_06,
	Author = {Dominik J. Bell and Yu Sun and Li Zhang and Lixin X. Dong and Bradley J. Nelson and D. Grützmacher},
	Title = {Three-dimensional nanosprings for electromechanical sensors},
	Journal = {Sensors and Actuators A},
	Volume = {130},
	Number = {pp. 54-61},
	Year = {2006},
	Abstract = {This paper presents the use of a novel fabrication technique to produce three-dimensional (3D) nanostructures with nanoscale features that can be used for electromechanical sensors. The process uses conventional microfabrication techniques to create a planar pattern in a SiGe/Si bilayer that then self-assembles into 3D structures during a wet etch release. An additional metal layer can be integrated for higher conductivity. Results from the fabrication of the structures are demonstrated. Nanomanipulation inside a scanning electron microscope (SEM) was conducted to probe the structures for mechanical and electrical characterization. The experimental characterization results were validated by finite element simulation.},
	Keywords = {Nanospring; Nanocoil; Electromechanical sensors; Nanomanipulation; Nanofabrication; Microfabrication; Self-assembly}
}

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