Publications of IRIS Members

Reference (inproceedings)

M. Suter, S. Graf, O. Ergeneman, S. Schmid, A. Camenzind, B. J. Nelson, C. Hierold, "Superparamagnetic Photosensitive Polymer Nanocomposite for Microactuators", Proc. in IEEE Conf. on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS2009), Denver, CO, USA, June 2009, pp. 869-872.

Abstract

We present a photosensitive polymer composite with superparamagnetic characteristics for the fabrication of microactuators. A uniform distribution of particles in the photosensitive polymer matrix SU-8 is achieved by applying superparamagnetic nanoparticles with the aid of a surfactant. The composite contains Fe3O4 nanoparticles up to 3 vol.% (12 wt.%) with diameters of around 13 nm. Superparamagnetic composite microcantilevers are successfully fabricated and actuated in resonance by the magnetic field of an external coil.

Keywords

Superparamagnetic composite, photosensitive composite, magnetic polymer, magnetic SU-8, magnetic resonant structure, magnetic cantilever, magnetic microactuator

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