Publications of IRIS Members
A. Subramanian, B. Vikramaditya, L. X. Dong, D. J. Bell, B. J. Nelson, "Micro and Nanorobotic Assembly Using Dielectrophoresis", Robotics Science and Systems I, Ed.: S. Thrun, G. S. Sukhatme, S. Schaal, and O. Brock, MIT Press, 2005, pp. 327-334.
The contact phase of an assembly task involving micro and nano objects is complicated by the presence of surface and intermolecular forces such as electrostatic, surface-tension and Van der Waals forces. Assembly strategies must account for the presence of these forces in order to guarantee successful repeatable micro and nanoassemblies with high precision. A detailed model for this electrostatic interaction is developed and analyzed. Based on the results of this analysis, dielectrophoretic assembly principles of MEMS/NEMS devices are proposed and experimentally verified with microtweezers for micro Ni parts and with nanoelectrodes fabricated with electron-beam lithography for carbon nanotube assembly. The successful manipulation and assembly of single carbon nanotubes (CNTs) using dielectrophoretic forces produced by nanoelectrodes will lead to a higher integration of CNTs into both nanoelectronics and NEMS.
Microassembly, nanoassembly, MEMS, NEMS, dielectrophoresis, carbon nanotubes
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