Publications of IRIS Members

Reference (inproceedings)

A. Subramanian, L. X. Dong, B. J. Nelson, "Selective Eradication of Individual Carbon Nanotubes from Vertically Aligned Arrays", Proc. IEEE/ASME Int. Conf. on Advanced Intelligent Mechatronics (AIM), Monterey, CA, USA, July 2005.

Abstract

Selective eradication is presented as a postprocessing technique for as-grown vertically aligned carbon nanotubes (CNTs) for removing unwanted individual nanotubes in order to generate desired patterns. A scanning anode is applied to select a nanotube in a CNT emitter array. Using a saturated emission current, a nanotube emitter can be removed in a controlled way. Vertically aligned single multiwalled carbon nanotubes (MWNTs) are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. The scanning anode is actuated with a 3-DOF nanorobotic manipulator with nanometer resolution inside a scanning electron microscope (SEM). The patterned nanotube array can be applied as patterned emitter arrays for parallel electron-beam-induced deposition, nano imagers or read-only memory (ROM) devices for fixed pattern displaying or recording.

Keywords

carbon nanotube array, field emission, selective eradication, scanning anode, nanorobotic manipulator

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