Publications of IRIS Members
L. X. Dong, A. Subramanian, B. J. Nelson, Y. Sun, "Nanotube Encoders", Solid State Phenomena, Vol. 121, 2007, pp. 1363-1366.
Linear encoders for nanoscale position sensing based on vertical arrays of single multi-walled carbon nanotubes (MWNTs) are investigated from experimental, theoretical, and design perspectives. Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapor deposition (PECVD) growth. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateral position of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9 nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized.
Carbon nanotube array, field emission, nano encoder, nanorobotic manipulator, scanning anode
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