Publications of IRIS Members

Reference (article)

D. Xu, K. Shou, B. J. Nelson, "Dielectrophoretic assembly of carbon nanotube-based NEMS devices using floating electrodes", Microelectronic Engineering (Elsevier), February 2011.

Abstract

We present a floating-electrode dielectrophoresis (DEP) approach for optimizing the assembly of individual carbon nanotubes (CNTs). A versatile four-electrode structure employing the properties of floatingelectrode DEP and optimal nanoelectrode geometry is described, which can be used to realize various NEMS devices. Finite element modeling (FEM) was used to investigate the influence of inactive electrodes on the electric fields and assembly behaviors of nanotubes (NTs). Experimental findings show that the DEP technique assisted by floating electrodes improves the alignment precision and achieves directional deposition of CNTs on multiple electrodes.

Keywords

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