NEMS Based on Vertical Arrays of CNTs
Directed Growth of Vertically Aligned CNTs
- Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapor deposition (PECVD). E-beam lithography is used to define nickel catalyst nanodots at precise locations on a silicon chip. Aligned nanotube arrays have been realized.
Nano Encoder
- In electric servomotors, encoders play a significant role by providing precision angular or linear position sensing feedback. Similarly, with the development of nano machines nanometer-scale position sensing with nanometer-sized devices is required for their successful application. Linear encoders for nanoscale position sensing based on arrays of single CNTs have been presented.
Group Members
- Arunkumar Subramanian, arun@ethz.ch
- Dr. Lixin Dong, ldong@ethz.ch
- Prof. Brad Nelson, bnelson@ethz.ch
