NEMS Based on Individual CNT-Based Nanostructures

Nano Electrostatic Linear Servomotor

Many 3-D helical structures with micro- and nano-features have been synthesized from different materials. Typical examples include carbon micro-coils based on amorphous carbon (X.Q. Chen <i>et al., Nano Lett.</i> <b>3</b>, 1299, 2003), carbon nanocoils based on carbon nanotubes (X.B. Zhang <i>et al., Europhys. Lett.</i> <b>27</b>, 141, 1994), and zinc oxide nanobelts (P.X. Gao <i>et al., Science</i> <b>309</b>, 1700, 2005). Recently, a new method of creating structures with nanometer-scale dimensions has been presented and can be fabricated in a controllable way (see Fig. 1). The high degree of precision with their shape/position, large compatibility with varied materials, their ultra-high flexibility (see Fig. 2) and their piezo-resistivity (see Fig. 3) indicate their potential as NEMS devices.
Many 3-D helical structures with micro- and nano-features have been synthesized from different materials. Typical examples include carbon micro-coils based on amorphous carbon (X.Q. Chen <i>et al., Nano Lett.</i> <b>3</b>, 1299, 2003), carbon nanocoils based on carbon nanotubes (X.B. Zhang <i>et al., Europhys. Lett.</i> <b>27</b>, 141, 1994), and zinc oxide nanobelts (P.X. Gao <i>et al., Science</i> <b>309</b>, 1700, 2005). Recently, a new method of creating structures with nanometer-scale dimensions has been presented and can be fabricated in a controllable way (see Fig. 1). The high degree of precision with their shape/position, large compatibility with varied materials, their ultra-high flexibility (see Fig. 2) and their piezo-resistivity (see Fig. 3) indicate their potential as NEMS devices.

Nano Electromagnetic Actuator

Fig. 1: (Left) Fabrication flow of rolled-up nanocoil. (Top right) FEM simulation of nanocoil (from Dr. Dominik Bell). (Bottom right) Freestanding SiGe/Si nanocoil with two contacts.

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