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Publications of IRIS Members

Reference (article)

L. Zhang, L. X. Dong, D. J. Bell, B. J. Nelson, D. Grützmacher, "Fabrication and Characterization of Freestanding Si/Cr Micro- and Nano-spirals", Microelectronic Engineering (Elsevier), Vol. 83, 2006, pp. 1237-1240.

BibTeX entry

@ARTICLE{Dong_06_04,
	Author = {Li Zhang and Lixin X. Dong and Dominik J. Bell and Bradley J. Nelson and D. Grützmacher},
	Title = {Fabrication and Characterization of Freestanding Si/Cr Micro- and Nano-spirals},
	Journal = {Microelectronic Engineering (Elsevier)},
	Volume = {83},
	Year = {2006},
	Pages = {pp. 1237-1240},
	Abstract = {We report on the scrolling of two-layer Si/Cr hybrid films on Si(001) wafers to form rolled-up micro-and nanostructures. Mesa stripes with width ranging from 3.0 lm to 60 nm have been used to fabricate the spirals. Decreasing the width gradually changes the scrolling direction of the Si/Cr stripe from the h100i direction to the longitudinal axis of the stripe. Moreover, the diameter of the Si/Cr rings decreases significantly with decreasing stripe width, which can be explained by edge effects at the side walls of the bilayer film. Based on this effect, freestanding Si/Cr spiral nanobelts can be fabricated. The flexibility of such spirals has been probed with a nano-manipulator showing their excellent shape-memory properties.},
	Keywords = {Spiral nanobelts; Coiling up; Nano- manipulation; Shape-memory}
}

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