Publications of IRIS Members

Reference (inproceedings)

L. X. Dong, L. Zhang, D. J. Bell, B. J. Nelson, D. Grützmacher, "Hybrid Nanorobotic Approaches for Fabricating NEMS from 3D Helical Nano-structures", Proc. 2006 IEEE Int. Conf. on Robotics & Automation, Orlando, Flordia, USA, May 2006.

Abstract

Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.

Keywords

Nanorobotics; nanomanipulation; nanoassembly; NEMS, 3D helical nanostructures

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